During the last weeks we installed two new instruments in our clean room, both systems funded by PNRR, through NQSTI partnership. The first one is the PIMOMASTER 100, a laser writer system by RAITH, that allows to have high resolution optical litography (down to 300 nm) on 5″ wafer. The second one is the FALCON RIE, a reactive ion etching system by Gambetti, equipped by Ar, O2, CF4 and Ar/H2 forming gas.
