New installations at NEST!

During the last weeks we installed two new instruments in our clean room, both systems funded by PNRR, through NQSTI partnership. The first one is the PIMOMASTER 100, a laser writer system by RAITH, that allows to have high resolution optical litography (down to 300 nm) on 5″ wafer. The second one is the FALCON RIE, a reactive ion etching system by Gambetti, equipped by Ar, O2, CF4 and Ar/H2 forming gas.

The installation of the PICOMASTER 100, laser writer system, in our ISO6 clean room
The FALCON RIE system, installed in our ISO 7 clean room